Foundations of MEMS
Liu, Chang Vaishali B. Mungurwadi Anil V. Nandi
Foundations of MEMS - New Delhi Dorling Kindersley 2012 - 576 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9788131764756 (pbk)
Microelectromechanical systems--MEMS development--Microelectronics--Microfabrication--Mechanical concepts--Electrostatic sensing--Piezoresistive sensors--FEAS
621.381 / LIU
Foundations of MEMS - New Delhi Dorling Kindersley 2012 - 576 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9788131764756 (pbk)
Microelectromechanical systems--MEMS development--Microelectronics--Microfabrication--Mechanical concepts--Electrostatic sensing--Piezoresistive sensors--FEAS
621.381 / LIU