Mechanics of microelectromechanical systems
Lobontiu, Nicolae Ephrahim Garcia
Mechanics of microelectromechanical systems - New York Kluwer Academic 2005 - xi, 405 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9788181288493 (pbk)
Microelectromechanical systems--Stiffness basics--Micro cantilevers --Micro hinges --Micro-suspensions--Micro transduction --Micro fabrication --FEAS
621 / LOB
Mechanics of microelectromechanical systems - New York Kluwer Academic 2005 - xi, 405 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9788181288493 (pbk)
Microelectromechanical systems--Stiffness basics--Micro cantilevers --Micro hinges --Micro-suspensions--Micro transduction --Micro fabrication --FEAS
621 / LOB