Materials science of thin films
Ohring, Milton
Materials science of thin films deposition and structure - Amsterdam Elsevier 2015 - xxi, 794 p. : ill. ; 23 cm.
Includes references, appendix and index.
9789381269534 (pbk)
Physics
Thin films--Ion-Surface interactions--Materials science-Thin films--Vacuum science--Evaporation processes--Material science--Plasma interactions--Film-Structure--RICAS
530.4175 / OHR
Materials science of thin films deposition and structure - Amsterdam Elsevier 2015 - xxi, 794 p. : ill. ; 23 cm.
Includes references, appendix and index.
9789381269534 (pbk)
Physics
Thin films--Ion-Surface interactions--Materials science-Thin films--Vacuum science--Evaporation processes--Material science--Plasma interactions--Film-Structure--RICAS
530.4175 / OHR