Introductory MEMS
Adams, Thomas M. Richard A. Layton
Introductory MEMS fabrication and applications - New Delhi Springer 2012 - xv, 444 p. : ill. ; 23 cm.
Includes appendix and index.
9780387095110 (pbk) 9788132206637 (pbk)
Physics
Microelectromechanical systems--Electronic apparatus--Microfabrication lab--Systems engineering--Solid Mechanics--Silicon growth --Transducers --Microfluidics --Electronics --Surfaces--Materials --RICAS
621.381 / ADA
Introductory MEMS fabrication and applications - New Delhi Springer 2012 - xv, 444 p. : ill. ; 23 cm.
Includes appendix and index.
9780387095110 (pbk) 9788132206637 (pbk)
Physics
Microelectromechanical systems--Electronic apparatus--Microfabrication lab--Systems engineering--Solid Mechanics--Silicon growth --Transducers --Microfluidics --Electronics --Surfaces--Materials --RICAS
621.381 / ADA