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Microsystem design

Senturia, Stephen D.

Microsystem design - New Delhi Springer (India) Private Limited. 2001 - xxvi, 689 p. : ill. ; 24 cm.

ISBN: 8181285468 (pbk)

Subjects--Topical Terms:
Engineering
Microelectromechanical systems--Microsystem design--Energy methods--Microfabrication--Electronics--Fluids--FEAS--RCST

Dewey Class. No.: 621.381 / SEN

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