Simulation of Si2Hx density in SiH4/H2 capactive couple plasma
Muhammad Zaid (1134)
Simulation of Si2Hx density in SiH4/H2 capactive couple plasma - Islamabad (Unpublished) 2022 - xiii, 59 p. : ill. Col. ; 30 cm. +CD
Submitted in partial fulfillment of the requirements for the degree of Master of Philosophy in Physics to the Department of Basic Sciences. Includes bibliographical references. Thesis supervisor: Dr. Muhammad Waqar
Thesis (M.Phil)--Riphah International University, 2022
English
Physics --Capacitive couple plasma (CCP)--Inductive couple plasma (ICP)--Plasma simulation models--Plasma classificaions --DBS--FEAS
530 / ZAI
Simulation of Si2Hx density in SiH4/H2 capactive couple plasma - Islamabad (Unpublished) 2022 - xiii, 59 p. : ill. Col. ; 30 cm. +CD
Submitted in partial fulfillment of the requirements for the degree of Master of Philosophy in Physics to the Department of Basic Sciences. Includes bibliographical references. Thesis supervisor: Dr. Muhammad Waqar
Thesis (M.Phil)--Riphah International University, 2022
English
Physics --Capacitive couple plasma (CCP)--Inductive couple plasma (ICP)--Plasma simulation models--Plasma classificaions --DBS--FEAS
530 / ZAI