USLI Technology (Record no. 2776)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00521nam a22001577a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0071141057 (pbk) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0070630023 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| Author Mark | ULS |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Authorship | C. Y. Chang (editor) |
| -- | S. M. Sze (editor) |
| 245 ## - TITLE STATEMENT | |
| Title | USLI Technology |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Singapore |
| Name of publisher | McGraw-Hill |
| Date of publication | 1996 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxv, 726 p. |
| Illustrations | : ill. |
| Dimensions | ; 23 cm. |
| 500 ## - GENERAL NOTE | |
| General note | Includes index. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Subject | Electronics |
| -- | Electronics--Integrated circuits |
| Keywords | Cleanroom technology |
| -- | Wafer-Cleaning technology |
| -- | Epitaxy |
| -- | Etching |
| -- | Lithography |
| -- | FEAS |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| item type | Books |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Source of acquisition | Cost, normal purchase price | Full call number | Barcode | Copy number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Main Campus | Main Campus | Purchased: Pak Book Cooperation | 810.50 | 621.381 ULS | 0576 | 1 | Books |