Handbook of VLSI microlithography (Record no. 5269)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00589nam a22001337a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 8179924750 (hb) |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 |
| Author Mark | HAN |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Authorship | John N. Helbert (editor) |
| 245 ## - TITLE STATEMENT | |
| Title | Handbook of VLSI microlithography |
| Sub Title | principles, tools, technology and applications |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Delhi |
| Name of publisher | JAICO Publishing House |
| Date of publication | 2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xix, 957 p. |
| Illustrations | : ill. |
| Dimensions | ; 24 cm. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Subject | Integrated circuits-Very large scale integrated |
| -- | Microlithography |
| Keywords | Resist technology-Design processing |
| -- | Implementation of strategy |
| -- | Lithography process |
| -- | Rational vibration |
| -- | Photo metrology |
| -- | FEAS |
| -- | FC |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| item type | Books |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Source of acquisition | Cost, normal purchase price | Full call number | Barcode | Copy number | Koha item type | Public note |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| NOT for LOAN | Main Campus | Main Campus | Purchased: Pak American Commercial Company | 3271.00 | 621.381531 HAN | 4010 | 1 | Books | Reference: |