VLSI technology (Record no. 7810)

MARC details
000 -LEADER
fixed length control field 00673nam a22001697a 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9780070582910 (pbk)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 0070582912 (pbk)
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.395
Author Mark VLS
100 ## - MAIN ENTRY--PERSONAL NAME
Authorship S. M. Sze (editor)
245 ## - TITLE STATEMENT
Title VLSI technology
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication New Delhi
Name of publisher The McGraw-Hill companies
Date of publication 2003
300 ## - PHYSICAL DESCRIPTION
Extent xii, 676 p.
Illustrations : ill.
Dimensions ; 22 cm.
500 ## - GENERAL NOTE
General note Includes index
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Subject Electrical engineering
-- Integrated circuit
Keywords Wafer preparation
-- Crystal growing
-- Plasma etching
-- Metallization applications
-- Atomic diffusion
-- Process simulation
-- Process integration
-- Analytical techniques
-- Assembly techniques
-- VLSI devices
-- Diffusion
-- FEAS
942 ## - ADDED ENTRY ELEMENTS (KOHA)
item type Books
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Source of acquisition Cost, normal purchase price Full call number Barcode Copy number Koha item type
        Main Campus Main Campus Purchased: Saeed Book Bank Islamabad 927.20 621.395 VLS 7894 1 Books
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