Two dimensional fluid simulation of SiH4/H2 capacitive coupled plasma investigation of temperature dependent behavior
Material type:
TextPublication details: Islamabad (unpublished) 2024Description: 44 p. : ill. ; 30 cm. +CDSubject(s): DDC classification: - 530 SAQ
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Thesis
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A dissertation submitted in the partial fulfillment of the requirements for the degree of Master of Philosophy in Physics Department of Basic Sciences.
Includes bibliographical references.
Thesis supervisor: Dr. Muhammad Waqar Ahmed
Thesis (M.Phil.)--Riphah International University, 2024
English
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