Two dimensional fluid simulation of SiH4/H2 capacitive coupled plasma investigation of temperature dependent behavior

By: Material type: TextTextPublication details: Islamabad (unpublished) 2024Description: 44 p. : ill. ; 30 cm. +CDSubject(s): DDC classification:
  • 530 SAQ
Dissertation note: Thesis (M.Phil.)--Riphah International University, 2024
List(s) this item appears in: FEAS & DBS Thesis I-14 Campus
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