Two dimensional fluid simulation of HBR/O2 capactive coupled plasma effect of gas ratio on electron density, ion density, and electric field distribution

By: Material type: TextTextPublication details: Islamabad (Unpublished) 2025Description: xiv , 62 p. : ill , Col. ; 30 cm. +CDSubject(s): DDC classification:
  • 530 SUM
Dissertation note: Thesis (M.Phil)--Riphah International University, 2025
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