Two-dimensional fluid simulation study of SiH4/H2 capacitive coupled plasma pressure-dependent behavior of SiH+, SiH2, SiH2+ and SiH4 densities
Material type:
TextPublication details: Islamabad (Unpublished) 2025Description: xiii , 48 p. : ill , Col. ; 30 cm. +CDSubject(s): DDC classification: - 530 MUS
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Thesis
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Main Campus | 530 MUS (Browse shelf(Opens below)) | 1 | NOT for LOAN | 103256 |
Submitted in partial fulfillment of the requirements for the degree of Master of Philosophy in Physics to the Department of Basic Sciences.
Includes bibliographical references.
Thesis supervisor: Dr. Muhammad Waqar Ahmed
Thesis (M.Phil)--Riphah International University, 2025
English
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