TY  - BOOK
AU  - Liu,Chang
TI  - Foundations of MEMS
SN  - 9788131764756 (pbk)
U1  - 621.381 
PY  - 2012///
CY  - New Delhi
PB  - Dorling Kindersley 
KW  - Microelectromechanical systems
KW  - MEMS development
KW  - Microelectronics
KW  - Microfabrication
KW  - Mechanical concepts
KW  - Electrostatic sensing
KW  - Piezoresistive sensors
KW  - FEAS
N1  - Includes bibliographical references and index
ER  -