00521cam a22001217a 4500020002400000082001300024100003900037245004900076260003600125300003300161500005100194650015400245  a9788181288493 (pbk)00a621bLOB1 aLobontiu, NicolaeaEphrahim Garcia10aMechanics of microelectromechanical systems   aNew YorkbKluwer Academicc2005  axi, 405 p.b: ill.c; 24 cm.  aIncludes bibliographical references and index. 0aMicroelectromechanical systemsvStiffness basicsvMicro cantilevers vMicro hinges vMicro-suspensionsvMicro transduction vMicro fabrication vFEAS