TY  - BOOK
AU  - Lobontiu,Nicolae
TI  - Mechanics of microelectromechanical systems 
SN  - 9788181288493 (pbk)
U1  - 621 
PY  - 2005///
CY  - New York
PB  - Kluwer Academic
KW  - Microelectromechanical systems
KW  - Stiffness basics
KW  - Micro cantilevers
KW  - Micro hinges
KW  - Micro-suspensions
KW  - Micro transduction
KW  - Micro fabrication
KW  - FEAS
N1  - Includes bibliographical references and index
ER  -