P. Rai-Choudhury (Editor) <br/><br/>
MEMS and MOEMS technology and applications  

 - New Delhi  PHI Learning Private Limited  2009 
 - xi, 520 p.   : ill.   ; 24 cm. 
<br/><br/> Includes bibliographic references and index. 
<br/><br/><label>ISBN: </label>978812033752 (pbk) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Optical communications network--Optoelectronic devices--Optical microsystem--CMOS fabrication--Optical waveguides--Micromachines--MEMS --MOMS--FEAS
<br/><br/><label>Dewey Class. No.: </label>621.381  / MEM