TY  - BOOK
AU  - P. Rai-Choudhury (Editor)
TI  - MEMS and MOEMS technology and applications 
SN  - 978812033752 (pbk)
U1  - 621.381 
PY  - 2009///
CY  - New Delhi
PB  - PHI Learning Private Limited
KW  - Microelectromechanical systems
KW  - Optical communications network
KW  - Optoelectronic devices
KW  - Optical microsystem
KW  - CMOS fabrication
KW  - Optical waveguides
KW  - Micromachines
KW  - MEMS
KW  - MOMS
KW  - FEAS
N1  - Includes bibliographic references and index
ER  -