00746cam a22001574a 4500020002300000082001700023100003000040245004800070260005000118300003500168500004900203650018400252942000700436952012800443999001700571  a978812033752 (pbk)00a621.381bMEM  aP. Rai-Choudhury (Editor)00aMEMS and MOEMS technology and applications   aNew DelhibPHI Learning Private Limitedc2009  axi, 520 p. b: ill. c; 24 cm.  aIncludes bibliographic references and index. 0aMicroelectromechanical systemsvOptical communications networkvOptoelectronic devicesvOptical microsystemvCMOS fabricationvOptical waveguidesvMicromachinesvMEMS vMOMSvFEAS  cBK  00104070aLCCbLCCd2016-03-01ePurchased: Ilmi Book Housel0o621.381 MEMp26308r2016-03-01 00:00:00t1w2016-03-01yBK  c14620d14620