Ghandhi, Sorab K. <br/><br/>
VLSI fabrication principles  silicon and gallium arsenide 

 - New Delhi  Wiley India (P.) Ltd  2013 
 - xxiv, 834 p.  : ill.  ; 23 cm. 
<br/><br/> Includes bibliographical references and index.<br/> 
<br/><br/><label>ISBN: </label>9788126517909 (pbk) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Gallium arsenide--Communication control--Crystal growth--Dislocations--Diffusion--Crystal --FEAS
<br/><br/><label>Dewey Class. No.: </label>621.38152  / GHA