TY  - BOOK
AU  - Ghandhi,Sorab K.
TI  - VLSI fabrication principles: silicon and gallium arsenide
SN  - 9788126517909 (pbk)
U1  - 621.38152 
PY  - 2013///
CY  - New Delhi
PB  - Wiley India (P.) Ltd
KW  - Integrated circuits
KW  - Gallium arsenide
KW  - Communication control
KW  - Crystal growth
KW  - Dislocations
KW  - Diffusion
KW  - Crystal
KW  - FEAS
N1  - Includes bibliographical references and index

ER  -