00664cam a22001694a 4500 0819459771 (hb) 9780819459779 (hb) 610.28 SAL Saliterman, Steven S. Fundamentals of bioMEMS and medical microdevices BioMEMS and medical microdevices Washington SPIE 2006 xxvii, 610 p. : ill. ; 26 cm. Includes glossary, appendices, bibliographical references and index. Nanotechnology Biotechnology Nanoscience BioMEMS Micro-electronics Molecular technology Nanoscale technology Microelectromechanical systems FEAS BK 0 0 0 0 RIU RIU 2017-08-16 Purchased: Progressive International Agencies 12751.00 1 610.28 SAL 28653 2017-08-18 00:00:00 2017-08-18 1 2019-02-21 BK 19945 19945