TY  - BOOK
AU  - Saliterman,Steven S.
TI  - Fundamentals of bioMEMS and medical microdevices
SN  - 0819459771 (hb)
U1  - 610.28 
PY  - 2006///
CY  - Washington
PB  - SPIE
KW  - Nanotechnology
KW  - Biotechnology
KW  - Nanoscience
KW  - BioMEMS
KW  - Micro-electronics
KW  - Molecular technology
KW  - Nanoscale technology
KW  - Microelectromechanical systems
KW  - FEAS
N1  - Includes glossary, appendices, bibliographical references and index
ER  -