00844cam a22001814a 4500020002000000020002300020082001600043100002600059245005300085246003700138260002700175300003800202500007300240650015700313942000700470952016800477999001700645  a0819459771 (hb)  a9780819459779 (hb)00a610.28bSAL1 aSaliterman, Steven S.10aFundamentals of bioMEMS and medical microdevices30aBioMEMS and medical microdevices  aWashingtonbSPIEc2006  axxvii, 610 p. b: ill. c; 26 cm.  aIncludes glossary, appendices, bibliographical references and index. 0aNanotechnologyvBiotechnologyvNanosciencevBioMEMSvMicro-electronicsvMolecular technologyvNanoscale technologyvMicroelectromechanical systemsvFEAS  cBK  00104070aRIUbRIUd2017-08-16ePurchased: Progressive International Agenciesg12751.00l1o610.28 SALp28653r2017-08-18 00:00:00s2017-08-18t1w2019-02-21yBK  c19945d19945