Liu, Chang  Vaishali B. Mungurwadi <br/><br/>
Foundations of MEMS 

 - New Delhi  Pearson Education  2017 
 - 576 p.  : ill.  ; 24 cm. 
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>9780132497367 (pbk) 9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Micromechanical systems--Electrostatic sensing--Electrical engineering --Thermal sensing--Magnetic actuation--Polymers Mems--Micro fluidics--FEAS
<br/><br/><label>Dewey Class. No.: </label>621.3  / LIU