00524cam a22001334a 4500020002400000020001800024082001500042100003900057245002400096260003900120300002900159500002000188650018200208  a9780132497367 (pbk)  a978813176475600a621.3bLIU1 aLiu, ChangaVaishali B. Mungurwadi10aFoundations of MEMS  aNew DelhibPearson Educationc2017  a576 p.b: ill.c; 24 cm.  aIncludes index. 0aMicroelectromechanical systemsaMicromechanical systemsvElectrostatic sensingvElectrical engineering vThermal sensingvMagnetic actuationvPolymers MemsvMicro fluidicsvFEAS