Liu, Chang Vaishali B. Mungurwadi creator text New Delhi Pearson Education 2017 monographic 576 p. : ill. ; 24 cm. Includes index. Microelectromechanical systems Micromechanical systems Electrostatic sensing Electrical engineering Thermal sensing Magnetic actuation Polymers Mems Micro fluidics FEAS 621.3 LIU 9780132497367 (pbk) 9788131764756