TY  - BOOK
AU  - Liu,Chang
TI  - Foundations of MEMS
SN  - 9780132497367 (pbk)
U1  - 621.3 
PY  - 2017///
CY  - New Delhi
PB  - Pearson Education
KW  - Microelectromechanical systems
KW  - Micromechanical systems
KW  - Electrostatic sensing
KW  - Electrical engineering
KW  - Thermal sensing
KW  - Magnetic actuation
KW  - Polymers Mems
KW  - Micro fluidics
KW  - FEAS
N1  - Includes index
ER  -