00559nam a22001577a 4500 9780750305457 (pbk) 530.44 ROT Roth, J Reece Industrial plasma engineering Bristol Institute of Physics Publishing 2001 xi, 645 p. : ill. ; 23 cm. Includes appendix and index. Volume 2. Plasma engineering Physics Kinetic theory-Gases Electron sources-Beams Ion sources-Beams Vacuum plasma sources Plasma etching Plasma RICAS REF 0 0 0 1 LCC LCC 2018-12-13 Purchased: Progressive International Agencies 9187.69 0 530.44 ROT 38165 2018-12-13 00:00:00 1 2019-02-21 BK 23769 23769