TY  - BOOK
AU  - Roth, J Reece
TI  - Industrial plasma engineering
SN  - 9780750305457 (pbk)
U1  - 530.44	 
PY  - 2001///
CY  - Bristol
PB  - Institute of Physics Publishing
KW  - Plasma engineering	
KW  - Physics
KW  - Kinetic theory-Gases
KW  - Electron sources-Beams
KW  - Ion sources-Beams
KW  - Vacuum plasma sources
KW  - Plasma etching
KW  - Plasma
KW  - RICAS
N1  - Includes appendix and index; Volume 2
ER  -