00726nam a22001697a 4500020002400000082001700024100001800041245003400059260005100093300003300144500003300177505001400210650015200224942000800376952015500384999001700539  a9780750305457 (pbk)  a530.44	bROT  aRoth, J Reece  aIndustrial plasma engineering  aBristolbInstitute of Physics Publishingc2001  axi, 645 p.b: ill.c; 23 cm.  aIncludes appendix and index.  aVolume 2.  aPlasma engineering	aPhysicsvKinetic theory-GasesvElectron sources-BeamsvIon sources-BeamsvVacuum plasma sourcesvPlasma etchingvPlasmavRICAS  cREF  00104071aLCCbLCCd2018-12-13ePurchased: Progressive International Agenciesg9187.69l0o530.44 ROTp38165r2018-12-13 00:00:00t1w2019-02-21yBK  c23769d23769