00546cam a22001334a 4500 9780306474972 (pbk) 539.7092 CHE Chen, Francis F. Jane P. Chang Lecture notes on principles of plasma processing New York Kluwer Academic/Publishers 2003 ix, 208 p. : ill. ; 28 cm. Plasma engineering Physics Inelastic collisions Plasma dynamics Plasma chemistry Optical materials Atomic collisions Elastic collisions Nuclear physics RICAS REF 0 0 0 1 GGL GGL 2018-12-31 Purchased: Pak Book Corporation 16070.68 0 539.7092 38205 2019-07-01 00:00:00 1 BK 23914 23914