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  <titleInfo>
    <title>Lecture notes on principles of plasma processing</title>
  </titleInfo>
  <name type="personal">
    <namePart>Chen, Francis F. Jane P. Chang</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="text">New York</placeTerm>
    </place>
    <publisher>Kluwer Academic/Publishers</publisher>
    <dateIssued>2003</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <physicalDescription>
    <extent>ix, 208 p.  : ill.  ; 28 cm.</extent>
  </physicalDescription>
  <subject authority="lcsh">
    <topic>Plasma engineering Physics</topic>
    <topic>Inelastic collisions</topic>
    <topic>Plasma dynamics</topic>
    <topic>Plasma chemistry</topic>
    <topic>Optical materials</topic>
    <topic>Atomic collisions</topic>
    <topic>Elastic collisions</topic>
    <topic>Nuclear physics	</topic>
    <topic>RICAS</topic>
  </subject>
  <classification authority="ddc">539.7092 CHE</classification>
  <identifier type="isbn">9780306474972 (pbk)</identifier>
  <recordInfo/>
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