TY  - BOOK
AU  - Chen,Francis F.
TI  - Lecture notes on principles of plasma processing 
SN  - 9780306474972 (pbk)
U1  - 539.7092 
PY  - 2003///
CY  - New York 
PB  - Kluwer Academic/Publishers
KW  - Plasma engineering
KW  - Physics
KW  - Inelastic collisions
KW  - Plasma dynamics
KW  - Plasma chemistry
KW  - Optical materials
KW  - Atomic collisions
KW  - Elastic collisions
KW  - Nuclear physics	
KW  - RICAS
ER  -