00686cam a22001454a 4500020002400000082001800024100003600042245005400078260004800132300003500180650017200215942000800387952012800395999001700523  a9780306474972 (pbk)00a539.7092bCHE1 aChen, Francis F.aJane P. Chang10aLecture notes on principles of plasma processing   aNew York bKluwer Academic/Publishersc2003  aix, 208 p. b: ill. c; 28 cm. 0aPlasma engineeringaPhysicsvInelastic collisionsvPlasma dynamicsvPlasma chemistryvOptical materialsvAtomic collisionsvElastic collisionsvNuclear physics	vRICAS  cREF  00104071aGGLbGGLd2018-12-31ePurchased: Pak Book Corporationg16070.68l0o539.7092p38205r2019-07-01 00:00:00t1yBK  c23914d23914