Ohring, Milton <br/><br/>
Materials science of thin films  deposition and structure 

 - Amsterdam  Elsevier  2015 
 - xxi, 794 p.  : ill.  ; 23 cm. 
<br/><br/> Includes references, appendix and index. 
<br/><br/><label>ISBN: </label>9789381269534 (pbk) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Physics<br/>Thin films--Ion-Surface interactions--Materials science-Thin films--Vacuum science--Evaporation processes--Material science--Plasma interactions--Film-Structure--RICAS
<br/><br/><label>Dewey Class. No.: </label>530.4175  / OHR