TY  - BOOK
AU  - Ohring, Milton
TI  - Materials science of thin films: deposition and structure
SN  - 9789381269534 (pbk)
U1  - 530.4175 
PY  - 2015///
CY  - Amsterdam
PB  - Elsevier
KW  - Physics
KW  - Thin films
KW  - Ion-Surface interactions
KW  - Materials science-Thin films
KW  - Vacuum science
KW  - Evaporation processes
KW  - Material science
KW  - Plasma interactions
KW  - Film-Structure
KW  - RICAS
N1  - Includes references, appendix and index
ER  -