TY  - BOOK
AU  - Adams, Thomas M.
TI  - Introductory MEMS: fabrication and applications
SN  - 9780387095110 (pbk)
U1  - 621.381 
PY  - 2012///
CY  - New Delhi
PB  - Springer
KW  - Physics
KW  - Microelectromechanical systems
KW  - Electronic apparatus
KW  - Microfabrication lab
KW  - Systems engineering
KW  - Solid Mechanics
KW  - Silicon growth
KW  - Transducers	
KW  - Microfluidics
KW  - Electronics	
KW  - Surfaces
KW  - Materials	
KW  - RICAS
N1  - Includes appendix and index
ER  -