TY  - BOOK
AU  - Grove, A. S.
TI  - Physics and technology of semiconductors devices
U1  - 621.38152 
PY  - 1967///
CY  - New York
PB  - John Wiley & Sons, Inc.
KW  - Physics
KW  - Semiconductors
KW  - Solid-State diffusion
KW  - Semiconductor devices
KW  - Junction transistors
KW  - Thermal Oxidation
KW  - Planar technology
KW  - Technology
KW  - Insulator
KW  - RICAS
N1  - Includes references and index
ER  -