C. Y. Chang (editor)  S. M. Sze (editor) <br/><br/>
USLI Technology 

 - Singapore  McGraw-Hill  1996 
 - xxv, 726 p.  : ill.  ; 23 cm. 
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>0071141057 (pbk) 0070630023 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics<br/>Electronics--Integrated circuits--Cleanroom technology--Wafer-Cleaning technology--Epitaxy--Etching--Lithography--FEAS
<br/><br/><label>Dewey Class. No.: </label>621.381  / ULS