TY  - BOOK
AU  - C. Y. Chang (editor)
TI  - USLI Technology
SN  - 0071141057 (pbk)
U1  - 621.381 
PY  - 1996///
CY  - Singapore
PB  - McGraw-Hill
KW  - Electronics
KW  - Electronics--Integrated circuits
KW  - Cleanroom technology
KW  - Wafer-Cleaning technology
KW  - Epitaxy
KW  - Etching
KW  - Lithography
KW  - FEAS
N1  - Includes index
ER  -