Senturia, Stephen D. <br/><br/>
Microsystem design 

 - New Delhi  Springer (India) Private Limited.  2001 
 - xxvi, 689 p.  : ill.  ; 24 cm. 
<br/><br/><label>ISBN: </label>8181285468 (pbk) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/>Microelectromechanical systems--Microsystem design--Energy methods--Microfabrication--Electronics--Fluids--FEAS--RCST
<br/><br/><label>Dewey Class. No.: </label>621.381  / SEN