TY  - BOOK
AU  - Senturia,Stephen D.
TI  - Microsystem design
SN  - 8181285468 (pbk)
U1  - 621.381 
PY  - 2001///
CY  - New Delhi
PB  - Springer (India) Private Limited.
KW  - Engineering
KW  - Microelectromechanical systems
KW  - Microsystem design
KW  - Energy methods
KW  - Microfabrication
KW  - Electronics
KW  - Fluids
KW  - FEAS
KW  - RCST
ER  -