Ghandhi, Sorab K. <br/><br/>
VLSI fabrication principles   silicon and gallium arsenide  

 - New York   John Wiley & Sons, Inc  1994 
 - xxiv, 834 p.   : ill.   ; 25 cm. 
<br/><br/> "A Wiley-Lnterscience publication." 
<br/><br/><label>ISBN: </label>0471580058 (hb) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits<br/>Gallium arsenide<br/>Silicon--Communication control--Crystal growth--Dislocations--Diffusion--Crystal --FEAS 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / GHA