TY  - BOOK
AU  - Ghandhi,Sorab K.
TI  - VLSI fabrication principles : silicon and gallium arsenide 
SN  - 0471580058 (hb)
U1  - 621.38152 
PY  - 1994///
CY  - New York 
PB  - John Wiley & Sons, Inc
KW  - Integrated circuits
KW  - Gallium arsenide
KW  - Silicon
KW  - Communication control
KW  - Crystal growth
KW  - Dislocations
KW  - Diffusion
KW  - Crystal
KW  - FEAS
N1  - "A Wiley-Lnterscience publication."
ER  -