@book{46608,
	author = {Muhammad Zaid (1134)},
	title = {Simulation of Si2Hx density in SiH4/H2 capactive couple plasma},
	publisher = {(Unpublished)},
	year = {2022},
	address = {Islamabad},
	note = {Submitted in partial fulfillment of the requirements for the degree of Master of Philosophy in Physics to the Department of Basic Sciences.}
}