TY  - BOOK
AU  - Muhammad Zaid (1134)
TI  - Simulation of Si2Hx density in SiH4/H2 capactive couple plasma
U1  - 530 
PY  - 2022///
CY  - Islamabad
PB  - (Unpublished)
KW  - Physics
KW  - Capacitive couple plasma (CCP)
KW  - Inductive couple plasma (ICP)
KW  - Plasma simulation models
KW  - Plasma classificaions
KW  - DBS
KW  - FEAS
N1  - Submitted in partial fulfillment of the requirements for the degree of Master of Philosophy in Physics to the Department of Basic Sciences; Includes bibliographical references; Thesis supervisor: Dr. Muhammad Waqar; Thesis (M.Phil)--Riphah International University, 2022
ER  -