D. C. Gupta <br/><br/>
Semiconductor processing  : a symposium  

 - Philadelphia  ASTM  1984 
 - 671 p.  : ill.   ; 24 cm. 
<br/><br/> Includes appendix and index. 
<br/><br/><label>ISBN: </label>0803104030 (hb) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor industry--VLSI structure--Gain variation --Semiconductor quality--Electromagnetic rdiation--Microphone--Neutron transmulation--Sillicon productiob--RICAS
<br/><br/><label>Dewey Class. No.: </label>621.38152  / SEM