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  <titleInfo>
    <title>Semiconductor processing</title>
    <subTitle>: a symposium</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>D. C. Gupta</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="text">Philadelphia</placeTerm>
    </place>
    <publisher>ASTM</publisher>
    <dateIssued>1984</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <physicalDescription>
    <extent>671 p. : ill.  ; 24 cm.</extent>
  </physicalDescription>
  <note>Includes appendix and index.</note>
  <subject authority="lcsh">
    <topic>Semiconductor industry</topic>
    <topic>VLSI structure</topic>
    <topic>Gain variation</topic>
    <topic>Semiconductor quality</topic>
    <topic>Electromagnetic rdiation</topic>
    <topic>Microphone</topic>
    <topic>Neutron transmulation</topic>
    <topic>Sillicon productiob</topic>
    <topic>RICAS</topic>
  </subject>
  <classification authority="ddc">621.38152 SEM</classification>
  <identifier type="isbn">0803104030 (hb)</identifier>
  <recordInfo/>
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