TY  - BOOK
AU  - D. C. Gupta
TI  - Semiconductor processing: : a symposium 
SN  - 0803104030 (hb)
U1  - 621.38152 
PY  - 1984///
CY  - Philadelphia
PB  - ASTM
KW  - Semiconductor industry
KW  - VLSI structure
KW  - Gain variation
KW  - Semiconductor quality
KW  - Electromagnetic rdiation
KW  - Microphone
KW  - Neutron transmulation
KW  - Sillicon productiob
KW  - RICAS
N1  - Includes appendix and index
ER  -