00680pam a2200157 a 4500952013400000999001700134020002000151082001900171100001600190245004500206260002900251300003000280500003300310650017200343942000700515  00104070aGGLbGGLd2023-05-23ePurchased: Imperial Book Companyg12208.80l0o621.38152 SEMp80651r2023-05-23 00:00:00t1yBK  c51377d51377  a0803104030 (hb)00a621.38152bSEM  aD. C. Gupta00aSemiconductor processingb: a symposium   aPhiladelphiabASTMc1984  a671 p.b: ill. c; 24 cm.  aIncludes appendix and index. 0aSemiconductor industryvVLSI structurevGain variation vSemiconductor qualityvElectromagnetic rdiationvMicrophonevNeutron transmulationvSillicon productiobvRICAS  cBK